Covered Chuck Spin Coating Systems
The range of Spin Coating models, many of which are equipped with a specially designed covered chuck system, are the optimal tools for uniformed coatings. Turbulence-related non-uniformities such as streaks, sheering, comets, striations, & splatters are eliminated. They are ideal for applications with square, rectangular or irregularly shaped substrates, & will uniformly coat into corners with no discernible edge bead. The covered chuck system eliminates the need for nested chucks & the associated backside contamination & particulates. Open chuck configurations offer much of the same processing advantages for applications where sheering & other non-uniformities are not likely to be present.
FEATURES:
- Configuration for Substrates of up to Twenty- Three (23) inches on the diagonal/diameter or 16” x 16” square.
- AC Brushless Spindle/Chuck Drive Motor with speeds of 10 to 1000 RPM ±1 RPM & acceleration of >750 RPM/s with no load.
- Covered Chuck Coating System.
- Touchscreen Graphical User Interface (GUI) Controller with multiple programs retention.
- Dispense arm with up to 3 liquid film lines & 3 cleaning solvent lines.
- Programmable chuck & bowl cleaning cycle.
- Up to Thirty (30) recipes each with Thirty (30) recipe steps.
OPTIONS:
- Remote bulk chemical delivery system
- Solvent Dispense Canister with level alert & controller
- Cartridge Dispense System
- Metered peristaltic pumps for coating material dispense with self-cleaning capability
- Stainless Steel frame & skins
- PVDF diaphragm pumps for solvent dispense
