Mixing Systems

The stand-alone mixing system offers a facilities-driven, manually adjustable, in-line surfactant mixing enclosure that can be connected to a valve-controlled dispense. Includes a level-sensing interface for the concentrate storage container.

Features & Options

Features:

  • Internal storag e for up to Five (5) gallons of surfactant concentrate with level-sensing interface
  • Adjustable in-line mixing pump, facilities DI H2O driven, standard configuration for .0 – 2% mixing rati

Applications:

  • Mixed surfactant dispense to brushes & port flushing interfaces

In-Line Reionizer

The ILR400 is an ideal solution for the problem of electrostatic discharge caused by the use of DI H2O. The system is equipped with a special membrane that mixes the CO2 gas into the water flow, thus controlling the DI H2O resistivity. The design of the ILR400 In-line DI H2O Reionizer System is based on the latest technological developments in its field. It features straight forward & user-friendly controls that allow versatility in application of the pure water process.

Features & Options

Features:

  • Up to 4.0 Gal./Min. Re-ionized DI H2O
  • Operating ranges of 0.02 to 1.2 MegOhms.
  • Digital Resistivity Meter that monitors the output of the DI H2O resistivity.
  • Closed loop feedback system with proportional valve & PID Controller to insure consistent reionization at a set point for a variable DI H2O flow rate.
  • No CO2 bubbles in the DI H2O line.
  • No DI H2O reservoir to allow bacteria growth.
  • Check valve to isolate the CO2 from the DI H2O source.
  • N2 purge & DI H2O trickle to eliminate bacteria growth during periods of shutdown.

Options:

  • Remote Alert Box with LED & Audible alarm for CO2 within range
  • Built to CE spec

Applications:

  • High-Pressure DI H2O for cleaning Photomasks & Wafers Infrared Heat Lamp for Complete Drying
  • High-Pressure DI H2O for cleaning Flat Panel Glass Substrates
  • High-Pressure DI H2O for cleaning Wafers during Dicing operations
  • Low-Pressure DI H2O for cooling the Dicing blades
  • Low-Pressure DI H2O for rinsing Wafers in Rinser-Dryers

Heaters

Features & Options